Contact detection for nanomanipulation in a scanning electron microscope
نویسندگان
چکیده
منابع مشابه
Contact detection for nanomanipulation in a scanning electron microscope.
Nanomanipulation systems require accurate knowledge of the end-effector position in all three spatial coordinates, XYZ, for reliable manipulation of nanostructures. Although the images acquired by a scanning electron microscope (SEM) provide high resolution XY information, the lack of depth information in the Z-direction makes 3D nanomanipulation time-consuming. Existing approaches for contact ...
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ژورنال
عنوان ژورنال: Ultramicroscopy
سال: 2012
ISSN: 0304-3991
DOI: 10.1016/j.ultramic.2012.04.010